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Department of Physics, Applied Physics, and Astronomy
Rensselaer Polytechnic Institute
110 Eighth Street, Troy, New York 12180-3590 USA

(518) 276-6310
Fax: (518) 276-6680

Toh-Ming Lu
Toh-Ming Lu  IGERT

Associate Director, Center for Integrated Electronics; Ray Palmer Baker Distinguished Professor; Professor of Physics


(518) 276-2979

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Ph.D., University of Wisconsin , Madison (Physics, 1976).
M.S., Worcester Polytechnic Institute (Physics, 1971).
B.S., Cheng Kung University , Taiwan (Physics, 1968).

Career Highlights:

Dr. Lu joined RPI in 1982. He served as the Chairman of the Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute from 1992 to 1997. He was the Director of the Semiconductor Research Corporation (SRC), Center for Advanced Interconnect Science and Technologies (CAIST) from 1999 to 2005 where 13 universities, 25 faculty, and more than 40 graduate students are engaged in a nation-wide interdisciplinary research in microelectronics. His honors include the 2005 SRC Faculty Leadership Award and the 2004 Materials Research Society Medal Award. He is Fellow of four major societies: American Physical Society, American Vacuum Society, American Association for the Advancement of Sciences, and the Materials Research Society. Dr. Lu published over 400 papers, 6 books, 10 patents, and graduated 33 Ph.D. students, who have assumed leadership positions in semiconductor companies such as IBM, Intel, AMD, Motorola, Analog, GE, and Chartered Semiconductor.

Research Interests:

Surface, interface, and thin film morphologies, and nano-structure formation; diffraction from imperfect surfaces, overlayers, dynamic growth fronts; growth and characterization of metal, ceramic, and polymeric thin films for nanoelectronics, photonics, and energy applications. Since '82, well funded research by NSF, DARPA, ARO, AFOSR, IBM, DEC, Kodak, Martin-Marietta, GE, Intel, Sheldahl, and AT&T.

Selected Publications:

1. “On the dynamics of Cu ions injection into low-k nanoporous materials under oscillating applied fields“, J. Borja,  J.L. Plawsky, T. -M. Lu, and W. Gill,  J. Appl. Phys. 113, 034104 (2013).

2. “Orientation domains in metalorganic chemical vapor deposited CdTe(111) film on cube-textured Ni”, G.-C. Wang, L.H. Zhang, K. Kisslinger, C. Gaire, A. Goyal, I. Bhat, and T.-M. Lu, Thin Solid Films 351, 217 (2013).

3.  “Low temperature epitaxial growth of Ge on CaF2 buffered cube-textured Ni”, C. Gaire, J. Palazzo, I. Bhat, A. Goyal, G.-C. Wang, and T.-M. Lu, J. Cryst. Growth 343, 31 (2012).

4. “Nanostructured electrodes for high-power lithium ion batteries”, Rahul Mukherjee, Rahul Krishnan, Toh-Ming Lu, Nikhil Koratkar, Nano Energy 1, 518-533 (2012).

5. “Resistivity of sub-50 nm copper lines epitaxially grown on Si(100) substrate”, Pei-I Wang, Michael D. Frey, Morris Washington, Saroj Nayak, and Toh-Ming Lu, Thin Solid Films 520, 6106 (2012).

6. “Orientation modulated epitaxy of Cu nanorods on Si(100) substrate”, Pei-I Wang, Huafang Li, and Toh-Ming Lu, IEEE Transactions on Nanotechnology 11, 542 (2012).

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